What is nSPEC®?

What is the nSPEC®?
The Nanotronics Imaging nSPEC® is an inspection device designed for high resolution microscopy and detection of wafer defects. With particular application in silicon carbide and Galium Nitride epi wafers, the nSPEC® offers fast quantification and qualification of defects with detailed reporting and mapping. The system can be provided fully automated with multiple magnifications in order to fully characterize defect frequency and type. The system offers complete rapid scanning and mosaicing of wafers. Reports and statistical functions are easily defined by users and generated by nSPEC®.

Our Hardware
The hardware is critical in an inspection system. We use only the highest quality optics from the worlds’ leaders in microscopy including Nikon. We couple the optics with high resolution cameras for image capture and analysis. By high resolution we do not mean just a high number of megapixels, but high spatial resolution - the ability to discern small variances (link to the resolution nano-topic section of our site). With great optics and photo-microscopy we then add lighting to meet these demanding applications. Wavelengths can be chosen and light paths selected to optimize resolution and imaging requirements. Really, this is still all optics but we need to add some mechanics of focus and scanning. For this we manufacture our own precision translation stages and microscope stands. Is this all of the hardware? No, but it is a good start. As said, though, hardware is nice, but …

Software makes the difference! There seems to be a distinction in the instrumentation field: quality control versus R&D. At Nanotronics Imaging we don’t like to make this distinction. Our job is to provide an instrument with the highest quality components and the easiest to use software interface. If you choose to look at 5 defects at 100x magnification or 100 defects at 5x, that should be your choice. With the hardware selected it should be a matter of software. In R&D, the technologists want full control of the microscope; focus, lighting, magnification, polarization, contrast, et. al. In quality control the technologists want the instrument to repeat, within parameters, what has been determined to be the inspection specification. For that reason we control, from the software, all aspects of a measurement. These controls include focus, specimen movement, lighting, and objective (magnification) selection. We can also automate color wheels, if you need color but a color camera does not offer the spatial resolution needed, polarizer’s and DIC. Do you require automatic specimen handling? We have capability for wafer handling and are happy to look at other specimen types. Our constant goal is to provide easy to set up, easy to use microscopy with a data output that is easy to apply. Software really does make the difference.

What about science at Nanotronics Imaging?
With so much engineering going on at Nanotronics Imaging it is easy to forget that all of this and our future will also be decided by basic science research both in our labs and with our partners. These explorations into new chip architecture, spectral analysis, reconstruction techniques, and illumination will create opportunities for our clients that are now only being imagined. Already we have written a Ph.D dissertation, and several journal articles, as well as applied for 3 patents on ideas that inspired us to look beyond conventional approaches to microscopy. We look forward to thinking, experimenting, and sharing ideas with universities and clients.

Detaylı bilgi almak bizimle irtibata geçin